PLANAR (KBTEM)
 
Systems for inspection of work masks

This class of equipment is intended for inspection of multiple work masks on the basis of master masks for series and low batch semiconductor production:
- Automated microsize inspection tool
- Mask pattern coordinates measurement system


 



EМ-6339
Automated micro size inspection system

  


EМ-6309
Mask pattern coordinates measure-ment system


 
 

Equipment for mask pattern generation and inspection

Precision pattern generators
Special application pattern generator
Photorepeaters
Automatic mask inspection
Laser-based mask defect repair systems
Systems for inspection of work masks
EМ-6339 Automated micro size inspection system
EМ-6309 Mask pattern coordinates measurement system
Automatic laser mask blank non-flatness inspection system

Planar Joint Stock Company (KBTEM)

Planar Research and Production Holdings for Precision Engineering