Laser-based mask defect repair systems

The laser-based mask defect repair systems are intended to repair photomasks with transparent and opaque defects.

A contour-projection method is used to form an optical image for the repair of opaque defects. Transparent defects are repaired through the laser-stimulated vapor deposition of metal-organic compounds. Defects are detected automatically on the bases of the defect file formed at the inspection stage.



Large-field laser-based mask defect repair system

Laser-based mask defect repair system