Laser-based mask defect repair systems

The laser-based mask defect repair systems are intended to repair photomasks with transparent and opaque defects.

A contour-projection method is used to form an optical image for the repair of opaque defects. Transparent defects are repaired through the laser-stimulated vapor deposition of metal-organic compounds. Defects are detected automatically on the bases of the defect file formed at the inspection stage.


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