|
Laser-based mask defect repair systems |
|
The laser-based mask defect repair systems are intended to repair photomasks with transparent and opaque defects.
A contour-projection method is used to form an optical image for the repair of opaque defects.
Transparent defects are repaired through the laser-stimulated vapor deposition of metal-organic compounds. Defects are detected automatically on the bases of the defect file formed at the inspection stage.
|
PLANAR (KBTEM)
