EM-6519 Automatic laser mask blank non-flatness inspection system


The system is intended for automatic mask blank non-flatness inspection followed by blank surface shape data displaying (2D and 3D surface shape imaging).


Blank size, mm102х102; 127х127; 153х153
Blank thickness, not more than, mm10
Blank surface inspection accuracy, not more than, um0.3
Power supply voltage/frequency, V/Hz230/50
Power consumption, not more than, W800
Weight, not more than, kg310