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EM-6519 Automatic laser mask blank non-flatness inspection system |
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The system is intended for automatic mask blank non-flatness
inspection followed by blank surface shape data displaying (2D and 3D
surface shape imaging).
SPECIFICATIONS
| Blank size, mm | 102х102; 127х127; 153х153 | | Blank thickness, not more than, mm | 10 | | Blank surface inspection accuracy, not more than, um | 0.3 | | Power supply voltage/frequency, V/Hz | 230/50 | | Power consumption, not more than, W | 800 | | Weight, not more than, kg | 310 |
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PLANAR (KBTEM)