Equipment for wafer pattern generation and inspection

The equipment for wafer patterning is crucial for mass production. High efficiency and high reproduction accuracy of process parameters are the most important parameter of such equipment. This equipment is unattended, upgraded by computer vision, with modern software, reprogrammable load devices.

PLANAR has a great experience in development of such equipment. History of the equipment development for wafer patterning and inspection at our enterprise is presented in historical retrospection.


Pattern generator for wafers		Equipment for wafer projection imaging		Tools for proximity exposure and double-side lithography


Large-area steppers		Wafer inspection equipment