Planar JSC
Equipment for wafer projection imaging

Equipment for wafer projection imaging is of crucial importance for the mass production in order to decrease cost price of products, therefore the most important parameter of this class of equipment is high efficiency and operational characteristics providing high percent yield. It is completely automated equipment with machine vision systems, high-end software, reprogrammable loading devices.

EМ-5084M Wafer Stepper

EM-5186 Double-side alignment mark placement system

EM-5884 Projection photo assembly system for wafer exposure

EM-5784 Automatic alighment and exposure system