PLANAR (KBTEM)
 
EQUIPMENT FOR WAFER PROJECTION IMAGING

Equipment for wafer projection imaging is of crucial importance for the mass production in order to decrease cost price of products, therefore the most important parameter of this class of equipment is high efficiency and operational characteristics providing high percent yield. It is completely automated equipment with machine vision systems, high-end software, reprogrammable loading devices.


 


 



EМ-5084BM
Wafer Stepper

 


EM-5186
Double-side alignment mark placement system

 


EM-5784
Automatic alighment and exposure system