«KBTEM-OMO»
JOINT STOCK COMPANY
 
Vacuum Chucks

 

Application: the chucks are intended to fix accurately silicon, glass, ceramic wafers during processing. The high accuracy of glass surface processing ensures high flatness (planarity) of the wafers being processed.

Specifications  

Material

glass ceramic, optical glass, metal

Overall Dimensions

200 x 200 mm glass ceramic to 500 x 500 mm metal

Size Mesa Diameter

0.1 mm and more

Mesa Height

0.02 - 0.5 mm

Deviation of Flat LensTops from The Normal

0.15 mm for glass ceramic and glass (determined by surface preparation