Vacuum Chucks


Application: the chucks are intended to fix accurately silicon, glass, ceramic wafers during processing. The high accuracy of glass surface processing ensures high flatness (planarity) of the wafers being processed.



glass ceramic, optical glass, metal

Overall Dimensions

200 x 200 mm glass ceramic to 350 x 350 mm metal

Size Mesa Diameter

0.1 mm and more

Mesa Height

0.02 - 0.3 mm

Deviation of Flat LensTops from The Normal

0.015 mm for glass ceramic and glass (determined by surface preparation)

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Shanghai, China
March 20-22, 2019
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