|
Application: the chucks are intended to fix accurately silicon, glass, ceramic wafers during processing. The high accuracy of glass surface processing ensures high flatness (planarity) of the wafers being processed.
Specifications
|
Material |
glass ceramic, optical glass, metal |
|
Overall Dimensions |
200 x
200 mm
glass ceramic to 350 x
350 mm
metal |
|
Size Mesa Diameter |
0.1 mm
and more |
|
Mesa Height |
0.02 -
0.3 mm
|
|
Deviation of Flat LensTops from The
Normal
|
0.015 mm
for glass ceramic and glass (determined by surface preparation) | |
PLANAR (KBTEM)