«KBTEM-OMO»
JOINT STOCK COMPANY
 
Photolithographed parts

Parts made by photolithography method (precision masks and reticles, measuring grids, sighting scales, test objects, radial limbs, code disks, analyzing masks and diaphragms, glass linear standards and linear raster scales)

Precision masks for manufacture of HIC and VLSI, for testing and certification of accuracy of opto-mechanical, inspection and measurement equipment

Substrate material

Optical glass, quartz, glass ceramics

Substrate size 

up to 305x305 mm 

Pattern

Arbitrary 

Positioning accuracy of features on a field

280х280 mm - ±1 μm
140х140
mm - ±0.5 μm  

Minimum feature on a field

100х100 mm – 1 μm 
200х200
mm – 1.5 μm  

Certification accuracy 

on a field  140х140 mm – 0.16 μm


Measuring grids, sighting scales, test objects for optical instruments and microscopes

Substrate material 

Optical glass, quartz, glass ceramics

Coating 

Chrome or antireflective for required wavelength

Pattern

Arbitrary

Minimum feature

0.7 μm

Certification accuracy

0.16 μm


Standard linear, radial and special test objects

Used for verification of resolution, depth of focus of process equipment optical systems, of optical instruments’ lenses, photographic lenses and materials, photographic and photolithography processes.

Image

Bright and dark field

Pattern

Arbitrary

Minimum feature

0.7 μm

Working field

Up to 140х140 mm


Radial limbs and code (raster) disks, analyzing masks and diaphragms

Application: angle encoders for CNC machine tools, process, inspection and measurement equipment.

Substrate material

Optical glass

Coating 

Chrome or antireflective for required wavelength

Diameter of optical parts 

6-280 mm 

Line increment

6"

For code limbs 

Up to 13 orders 


Glass linear standards and raster linear scales

Application: to certify opto-mechanical, inspection and measurement, special process and other types of equipment and instruments, also used are in linear encoders of CNC tools, etc.

Substrate material

Optical glass, quartz, glass ceramics

 

Coating 

 

Chrome or antireflective for required wavelength

Scale length 

Up to 630 mm – single-coordinate or
field 260
х260 mm – double-coordinate

Minimum line width 

2 μm 

Raster scale pitch 

4 μm  and more