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Planar Concern has been designing and manufacturing linear step motors since 1962. The range of motors includes one-axis, two-axes, multi-axes, rotary motors, motors with feedback as well.
Advantages of linear step motors over other transmission mechanisms:
- simple mechanical construction;
- absence of lead screws, driving gears, etc;
- easy to make systems with several objects moved independently in one plane
- small overall dimensions and weight of movable parts;
- high dynamic characteristics;
- low noise level;
- absence of wear of aerostatic bearings
- high reliability;
- environmental cleanliness;
Application:
- Equipment for semiconductor industry (laser pattern generators, wafer steppers, inspection and measurement systems, probers, wire bonders, die bonders, etc.)
- Equipment for electronics industry (PCB equipment, SMT equipment, laser processing equipment, visual inspection equipment, transport and handling systems, etc.)
- Machine building, robotic engineering and other industries.
In addition to our standard models we can design and produce LSMs and LSM-based systems on customer’s requirements.
Specifications
|
Parameter |
One-Axis
LA (LO) Series |
Two-Axis
LH Series |
Rotary
LR Series | |
Maximum working field, mm |
1500 x
150
|
1500 x
1000
|
Ø450 | |
Maximum speed, m/sec |
1 |
1 |
1 m/sec-1 | |
Maximum acceleration, m/sec2 |
10 |
10 |
1500 m/sec-2 | |
Positioning repeatability |
±3 mkm |
±3 mkm |
0,2 arc min | |
Static synchronising force |
450 H |
110 H |
- | |
Static synchronising moment |
- |
- |
2...30 H m | |
Gap type |
air bearing;ball bearing |
air |
air | |
Number of phases |
2 |
2; 4 |
2; 4 | |
Phase current, ±10% |
1.5;
3
|
1.5;
3
|
1.5;
3
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PLANAR (KBTEM)