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EМ-5434M High density integration PCB stepper |
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EM-5434M stepper is designed to enable a lithography process in the production of PCBs (IC Substrate) for flip-chip packaging (BGA/CSP).
The universality of the tool lies in capability to work with thick photoresist (50µm) and to control the resist side wall angle. |
Specifications
| Lens resolution L/S, µm | 8 | | Lens working field, mm | 70x250; 85x228 | | Projection imaging scale | 1:1 | | Automatic scale correction range, ppm | ±1000 | | Lens distortion, no more than, µm | ±2.5 | | Depth of focus, µm | ±100 | | Working wavelengths | i-(365nm)
h-(405nm)
g-(436nm) | | Exposure light power density in the PCB panel plane, mW/cm2 | 220 | | Irradiation uniformity in the image plane, not less than, % | ±5 | | Exposure dose error, % | ±3 | | Reticle size, mm | 254х305 | | Max substrate size, mm | 610x610 | | Power consumption, not more than, kW | 7 |
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PLANAR (KBTEM)