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EM-6519 AUTOMATIC LASER MASK BLANK NON-FLATNESS INSPECTION SYSTEM

 

EM-6519 AUTOMATIC LASER MASK BLANK NON-FLATNESS INSPECTION SYSTEM 

The system is intended for automatic mask blank non-flatness inspection followed by blank surface shape data displaying (2D and 3D surface shape imaging).

 

Specifications

Blank size, mm 102х102; 127х127; 153х153
Blank thickness, not more than, mm 10
Blank surface inspection accuracy, not more than, um 0.3
Power supply voltage/frequency, V/Hz 230/50
Power consumption, not more than, W 800
Weight, not more than, kg 310