«КБТЭМ-ОМО»
ОТКРЫТОЕ АКЦИОНЕРНОЕ ОБЩЕСТВО
 
EM-5162 SYSTEM FOR WORK MASK FABRICATION BY PROJECTION IMAGING

 

EM-5162 SYSTEM FOR WORK MASK FABRICATION BY PROJECTION IMAGING

 

 

The photorepeater is intended for fabrication of metalized master patterns and work photomasks in production of semiconductor devices, LSI and VLSI.

 

The photorepeater operates in automatic mode and is remotely controlled by the operator. Photorepeater operation is based on sequential transfer of the reduced reticle pattern on the mask blank. The Tool operates in sequence in the following automatic modes:

  • mask blank loading from the feeding cassette to the coordinate stage carriage holder;
  • mask blank holding on the work stage;
  • transfer of reduced reticle pattern and automatic focusing on each module;
  • mask unloading after exposure to the receiving cassette;
  • library for reticle selection and change (10 pcs.).

 

Specifications

Throughput at 0.35 s exposure time and 10 х 10 mm die on
127 х 127 mm substrates (61 modules)
35 photomasks/hour,
not less than
Coordinate stage carriage travel area (200 х 200) mm
Coordinate stage carriage positioning accuracy along Х and Y ±0.25 um, not more than
Coordinate stage carriage positioning irreproducibility along X and Y 0.2 um, not more than
Objective lens reduction ratio 1:5
Maximal photomask module size (16 х 16) mm
Minimal feature size on module field:
(10 х 10) mm
(16 х 16) mm
0.7 um, not more than
0.8 um, not more than
Minimal feature size (line, space) irreproducibility ±0.1 um, not more than
Mask blank size 5” x 5” (127 х 127) mm
6” x 6” (153 х 153) mm
7” x 7” (178 х 178) mm
Reticle size 5” x 5” (127 х 127) mm
Weight 2700 kg

 

Operation conditions

Optical unit: Class 100 clean room. Control unit: Class 10000 clean room. Power supply: 230 VAC, 50 Hz; power consumption: not more than 3kW; footprint 12 m2 (8 m2 in Class 100 room and 4 m2 in Class 10000 room).

 

 

 
Приглашаем посетить
наш стенд на выставке
 
Shanghai New International
Expo Centre
Шанхай, КНР
20-22 Марта, 2019
Add to My Expo Plan
Register Now